Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C: H Films Prepared through Magnetron Sputtering Deposition | |
Department | 固体润滑国家重点实验室 |
Liu XQ(刘小强)1; Hao JY(郝俊英)2; Yang, Hu1; Lin, Xiuzhou1; Zeng, Xianguang1 | |
2015 | |
Source Publication | Journal of Nanomaterials |
ISSN | 1687-4110 |
Pages | 194308(1-9) |
Abstract | Hydrogenated amorphous carbon films codoped with Si and Al ((Si, Al)/a-C:H) were deposited through radio frequency (RF, 13.56 MHz) magnetron sputtering on Si (100) substrate at different temperatures. The composition and structure of the films were investigated by means of X-ray photoelectron spectroscopy (XPS), TEM, and Raman spectra, respectively. The substrate temperature effect on microstructure and mechanical and tribological properties of the films was studied. A structural transition of the films from nanoparticle containing to fullerene-like was observed. Correspondingly, the mechanical properties of the films also had obvious transition. The tribological results in ambient air showed that high substrate temperature (>573 K) was disadvantage of wear resistance of the films albeit in favor of formation of ordering carbon clusters. Particularly, the film deposited at temperature of 423 K had an ultralow friction coefficient of about 0.01 and high wear resistance. |
Subject Area | 材料科学与物理化学 |
DOI | 10.1155/2015/194308 |
Funding Organization | State Key Laboratory of Solid Lubrication (Grant LSL-1303);Sichuan University of Science and Engineering (Grant 2013RC01);Material Corrosion and Protection Key Laboratory of Sichuan Province (Grant 2015CL14);the National Natural Science Foundation of China (Grant 51375471);973 projects (2013CB632302) of the Ministry of Science and Technology of China |
Indexed By | SCI |
If | 1.758 |
Language | 英语 |
Funding Project | 空间润滑材料组 |
compositor | 第二作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/18761 |
Collection | 固体润滑国家重点实验室(LSL) |
Affiliation | 1.Sichuan Univ Sci & Engn, Mat Corros & Protect Key Lab Sichuan Prov, Zigong 643000, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Liu XQ,Hao JY,Yang, Hu,et al. Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C: H Films Prepared through Magnetron Sputtering Deposition[J]. Journal of Nanomaterials,2015:194308(1-9). |
APA | Liu XQ,Hao JY,Yang, Hu,Lin, Xiuzhou,&Zeng, Xianguang.(2015).Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C: H Films Prepared through Magnetron Sputtering Deposition.Journal of Nanomaterials,194308(1-9). |
MLA | Liu XQ,et al."Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)/a-C: H Films Prepared through Magnetron Sputtering Deposition".Journal of Nanomaterials (2015):194308(1-9). |
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194308.pdf(4684KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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