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In-situ stress suppression of hydrogenated a-CNx film prepared via Ar gas introduction 期刊论文
Surface and Interface Analysis, 2017, 卷号: 49, 期号: 5, 页码: 370-375
Authors:  Wang, Qi;  He, Deyan;  Zhang JY(张俊彦)
Adobe PDF(434Kb)  |  Favorite  |  View/Download：127/4  |  Submit date：2017/05/10
Amorphous Carbon  Carbon Nitride Films  Stress  Raman  
The effect of thermal annealing on the microstructure and mechanical properties of magnetron sputtered hydrogenated amorphous carbon films 期刊论文
Surface and Interface Analysis, 2012, 卷号: 44, 期号: 2, 页码: 162-165
Authors:  Zhang B(张斌);  Zhou Y(周妍);  Zhang JY(张俊彦);  Wang Z(王舟);  Zhang JY(张俊彦)
Adobe PDF(202Kb)  |  Favorite  |  View/Download：289/6  |  Submit date：2013/07/12
Mechanical  Carbon Films  Magnetron Sputtering