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Structure and mechanical properties of reactive sputtering CrSiN films 期刊论文
Applied Surface Science, 2009, 卷号: 255, 页码: 4425-4429
Authors:  Zhang GA(张广安);  Wang LP(王立平);  Wang SC(王顺才);  Yan PX(阎鹏勋);  Xue QJ(薛群基)
Adobe PDF(464Kb)  |  Favorite  |  View/Download：209/5  |  Submit date：2012/11/13
Crsin FIlms  Magnetron Sputtering  Microstructure  Mechanical Properties  
The influence of processing gas on the mechanical properties of sputtered B–C–N–H films 期刊论文
Applied Surface Science, 2009, 卷号: 255, 页码: 8575-8581
Authors:  陈友明;  杨生荣;  张俊彦
Adobe PDF(621Kb)  |  Favorite  |  View/Download：198/1  |  Submit date：2012/11/13
Boron Carbon Nitride  Microstructure  Hardness  Residual Stress  Friction Coefficient