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Synthesis and characterization of quaternary Ti-Si-C-N film deposited by middle frequency magnetron sputtering 期刊论文
Advanced Materials Research, 2012, 卷号: 581-582, 页码: 540-543
Authors:  Jiang JL(姜金龙);  Chen D(陈娣);  Zhu WJ(朱伟君);  Jiang JL(姜金龙)
Adobe PDF(1404Kb)  |  Favorite  |  View/Download：325/3  |  Submit date：2013/07/12
Ti-si-c-n Films  Microstructure  Mf Magnetron Sputtering  
a-C:H 膜在不同真空度下的摩擦学行为研究 期刊论文
功能材料, 2012, 卷号: 43, 期号: 3, 页码: 313-316
Authors:  吴艳霞;  李红轩;  吉利;  冶银平;  孙晓军;  陈建敏;  周惠娣
Adobe PDF(775Kb)  |  Favorite  |  View/Download：383/1  |  Submit date：2013/07/12
磁控溅射  A-c∶h 膜  真空度  摩擦学性能  Magnetron Sputtering  A-c∶h Film  Vacuum Degree  Tribological Property