Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating | |
Department | 固体润滑国家重点实验室(LSL) |
Qiang L(强力)1; Gao KX(高凯雄)1; Zhang LF(张礼芳)1; Wang, Jian1,2; Zhang B(张斌)1; Zhang JY(张俊彦)1 | |
The second department | 607 |
2015 | |
Source Publication | Applied Surface Science |
ISSN | 0169-4332 |
Volume | 353Issue:无Pages:522-529 |
Abstract | W/Ti-doped diamond-like carbon (DLC) films were fabricated on Si substrates by co-sputtering W and Ti targets in methane and argon mixture atmosphere. The composition and the microstructure, internal stress, mechanical and tribological properties of the films were measured by X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), Raman spectra, BGS 6341 type film stress tester, nano-indentor and reciprocating ball-on-disc tester, respectively. The results indicated all films showed the amorphous structural characteristics and a constant thickness value of ∼600 nm (195 ± 15 nm Ti interlayer was designed in order to minimize the influence of Ti interlayer), and the Ti content increased from 0 to 34.5% as the W target current increased from 0 A to 14 A. As the W concentration increased from 0 to 2.6 at.%, the hardness increased to 12.7 GPa and the internal stress maintained at a low value and almost no change. Meanwhile, the friction coefficient and wear rate showed the lowest value (0.023 and 1.2 × 10−8 mm3/N m, respectively). With the W content increased to 34.5 at.% further, the internal stress, friction coefficient and wear rate of film are dramatically increased. |
Keyword | W/ti-doped Dlc Film Internal Stress Mechanical Properties Tribological Performance |
Subject Area | 材料科学与物理化学 |
DOI | 10.1016/j.apsusc.2015.06.040 |
Funding Organization | the 973 program 2013CB632300 ; the National Natural Science Foundation of China (Grant no. 51275508 ; 51205383) |
Indexed By | SCI |
If | 2.711 |
Language | 英语 |
Funding Project | 纳米润滑研究组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/18662 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Zhang B(张斌); Zhang JY(张俊彦) |
Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Lanzhou Univ Technol, Sch Petr Chem Engn, Lanzhou 730050, Peoples R China |
Recommended Citation GB/T 7714 | Qiang L,Gao KX,Zhang LF,et al. Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating[J]. Applied Surface Science,2015,353(无):522-529. |
APA | Qiang L,Gao KX,Zhang LF,Wang, Jian,Zhang B,&Zhang JY.(2015).Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating.Applied Surface Science,353(无),522-529. |
MLA | Qiang L,et al."Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating".Applied Surface Science 353.无(2015):522-529. |
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2015522-529.pdf(2833KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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