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中频磁控溅射制备ａ－Ｃ∶Ｈ（Ａｌ，Ｗ） 薄膜及其性能研究 期刊论文
摩擦学学报, 摩擦学学报, 2013, 2013, 卷号: 33, 33, 期号: 6, 页码: 556-564, 556-564
Authors:  龚秋雨;  郝俊英;  刘小强;  刘维民
Adobe PDF(2738Kb)  |  Favorite  |  View/Download：406/5  |  Submit date：2013/12/18
中频磁控溅射  中频磁控溅射  摩擦磨损  Ａ－ｃ∶ｈ（ａｌ  摩擦磨损  Ａ－ｃ∶ｈ（ａｌ  力学性能  Ｗ）薄膜  力学性能  Ｗ）薄膜  Medium Frequency Magnetron Sputtering  Medium Frequency Magnetron Sputtering  Friction And Wear  Ａ－ｃ∶ｈ（ａｌ  Friction And Wear  Ａ－ｃ∶ｈ（ａｌ  Mechanical Properties  Ｗ）films  Mechanical Properties  Ｗ）films