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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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张俊彦 [1]
杨生荣 [1]
陈友明 [1]
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Author：杨生荣
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Source Publication：Applied Surface Science
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The influence of processing gas on the mechanical properties of sputtered B–C–N–H films
期刊论文
Applied Surface Science, 2009, 卷号: 255, 页码: 8575-8581
Authors:
陈友明
;
杨生荣
;
张俊彦
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Submit date：2012/11/13
Boron Carbon Nitride
Microstructure
Hardness
Residual Stress
Friction Coefficient
