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The chemical composition and bonding structureofB–C–N–H thin films deposited by reactive magnetron sputtering 期刊论文
Surface and Interface Analysis, 2009, 卷号: 41, 页码: 865-871
Authors:  陈友明;  杨生荣;  张俊彦
Adobe PDF(364Kb)  |  Favorite  |  View/Download:175/0  |  Submit date:2012/11/13
B–c–n–h FIlm  Magnetron Sputtering  Xps  Ftir  Raman