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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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化学研究 [1]
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先进固体润滑膜组 [1]
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国家“863”计划资... [1]
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刘惠文 [1]
常海波 [1]
张治军 [1]
徐洮 [1]
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中文 [1]
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2005 [1]
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直流负偏压对类金刚石薄膜结构的影响
期刊论文
化学研究, 2005, 卷号: 16, 期号: 1, 页码: 35-38
Authors:
常海波
;
徐洮
;
张治军
;
刘惠文
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Submit date：2014/03/03
直流负偏压
类金刚石薄膜
等离子体
气相沉积
Dc Negative Bias
Diamond-like Carbon Films
Plasma
Vapor Deposition
