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工艺参数对PECVD TiN镀层性能的影响 期刊论文
固体润滑, 1991, 卷号: 11, 期号: 1, 页码: 51-62
Authors:  张平余;  刘洪;  丛秋滋;  张绪寿;  王秀娥;  顾则鸣
Adobe PDF(337Kb)  |  Favorite  |  View/Download:203/1  |  Submit date:2014/09/30
等离子体增强化学气相沉积  Tin镀层  物理机械性能  摩擦学性能  晶体学特征  沉积参数  Plasma Enhanced Chemical Vapor Deposition (Pecvd)  Tin coaTing  Physic-mechanical Properties  Tribological Characteristic  Crystallinity  Deposition Parameters