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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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非现建制 [1]
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固体润滑 [1]
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丛秋滋 [1]
刘洪 [1]
张平余 [1]
张绪寿 [1]
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顾则鸣 [1]
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中文 [1]
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1991 [1]
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Language：中文
Date Issued：1991
Creator：张平余
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工艺参数对PECVD TiN镀层性能的影响
期刊论文
固体润滑, 1991, 卷号: 11, 期号: 1, 页码: 51-62
Authors:
张平余
;
刘洪
;
丛秋滋
;
张绪寿
;
王秀娥
;
顾则鸣
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Submit date：2014/09/30
等离子体增强化学气相沉积
Tin镀层
物理机械性能
摩擦学性能
晶体学特征
沉积参数
Plasma Enhanced Chemical Vapor Deposition (Pecvd)
Tin coaTing
Physic-mechanical Properties
Tribological Characteristic
Crystallinity
Deposition Parameters
