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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Applied Su... [1]
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空间润滑材料组 [1]
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the Nation... [1]
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刘小强 [1]
刘维民 [1]
郑建云 [1]
郝俊英 [1]
龚秋雨 [1]
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Creator：刘维民
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Source Publication：Applied Surface Science
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TiN/TiCN multilayer films modified by argon plasma treatment
期刊论文
Applied Surface Science, 2013, 卷号: 280, 页码: 764-771
Authors:
Zheng JY(郑建云)
;
Hao JY(郝俊英)
;
Liu XQ(刘小强)
;
Gong QY(龚秋雨)
;
Liu WM(刘维民)
;
Hao JY(郝俊英)
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Submit date：2013/12/18
Tin/ticn Multilayer Film
Argon Plasma Treatment
Structure
Mechanical And Tribological Properties
