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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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Author：薛群基
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Date Issued：2023
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Deposition of DLC film on the inner surface of N80 pipeline by hollow cathode PECVD
期刊论文
Surface Science and Technology, 2023, 期号: 1, 页码: 12
Authors:
Zhengyu Liu
;
Chenglong Mou
;
Pingmei Yin
;
Xueqian Cao
;
Guangan Zhang
;
Qunji Xue
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Submit date：2023/12/29
