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Thickness determination of molecularly thin lubricant films by angle-dependent X-ray photoelectron spectroscopy 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4688-4693
Authors:  Pang ZJ(庞重军);  Bai MW(白明武)
Adobe PDF(219Kb)  |  Favorite  |  View/Download:50/0  |  Submit date:2013/11/01
Thickness Determination  Metrology  Angle-dependent Xps  Lubricant  Perfluoropolyether