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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Funding Organization：the Chinese Natural Science Foundation (Grant no. 50375151)
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A simple approach to fabricate amorphous silicon pattern on single crystal silicon
期刊论文
Tribology International, 2007, 卷号: 40, 页码: 360-364
Authors:
Li XC(李小成)
;
Lv JJ(吕晋军)
;
Wan ZH(万志华)
;
Meng JH(孟军虎)
;
Yang SR(杨生荣)
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Submit date：2013/11/01
Amorphous
Single Crystal Silicon
Scratch
