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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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物理学报 [1]
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空间润滑材料组 [1]
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国家自然科学基金(批... [1]
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姜金龙 [1]
杨华 [1]
王善民 [1]
王琼 [1]
郝俊英 [1]
魏智强 [1]
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2014 [1]
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SCI&CSCD [1]
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沉积温度对钛硅共掺杂类金刚石薄膜生长、结构和力学性能的影响
期刊论文
物理学报, 2014, 卷号: 63, 期号: 2, 页码: 028104(1-7)
Authors:
姜金龙
;
黄浩
;
王琼
;
王善民
;
魏智强
;
杨华
;
郝俊英
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Submit date：2014/12/17
类金刚石薄膜
共掺杂
沉积温度
结构与性能
Diamond-like Carbon Film
Deposition Temperature
Co-doping
Structure And Properties
