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Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(295Kb)  |  Favorite  |  View/Download:200/1  |  Submit date:2014/12/23
Carbon Nitride Films  Pecvd  Composition  Mechanical Properties