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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Nuclear In... [1]
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Youth Scie... [1]
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吴志国 [1]
张广安 [1]
王君 [1]
白利春 [1]
阎鹏勋 [1]
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2011 [1]
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Funding Organization：Youth Science Fund of the National Nature Science Foundation (NO.11004203)
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Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)
期刊论文
Nuclear Instruments and Methods in Physics Research B, 2011, 卷号: 269, 页码: 1871-1877
Authors:
Bai LC(白利春)
;
Zhang GA(张广安)
;
Wu ZG(吴志国)
;
Wang J(王君)
;
Yan PX(阎鹏勋)
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Submit date：2012/09/24
Hydrogen-free Amorphous Carbon (A-c)
FIlms
Ion Beam Sputtering depositIon (Ibsd)
Ion Beam Energy
Structure
Properties
