Chinese | English

Search in the results

LICP OpenIR

Browse/Search Results:  1-1 of 1 Help

Filters    
Selected(0)Clear Items/Page:    Sort:
The effects of negative bias and flux ratio on the properties of TiN thin films formed by filtered cathodic arc plasma technique 期刊论文
Acta metallurgica sinica, 2005, 卷号: 18, 期号: 3, 页码: 369-374
Authors:  Zhang YJ(张玉娟);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Zhang WW(张伟伟);  Wang J(王君);  Xue QJ(薛群基)
Adobe PDF(737Kb)  |  Favorite  |  View/Download：197/0  |  Submit date：2014/03/03
Tin  Filtered Cathodic Arc Plasma  Preferred Orientation