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Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering 期刊论文
Surface and Coatings Technology, 2014, 卷号: 240, 页码: 419-424
Authors:  Jiang JL(姜金龙);  Wang Q(王琼);  Huang H(黄浩);  Wang YB(王玉宝);  Zhang X(张霞);  Hao JY(郝俊英);  Jiang JL(姜金龙)
Adobe PDF(778Kb)  |  Favorite  |  View/Download：193/3  |  Submit date：2014/12/17
A-c:h Films  Mf Magnetron Sputtering  Substrate Rotation  Microstructure And Property  
Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering 期刊论文
Journal of Nanomaterials, 2014, 页码: 937068-7
Authors:  Jiang JL(姜金龙);  Wang Q(王琼);  Wang YB(王玉宝);  Zhang X(张霞);  Yang H(杨华);  Hao JY(郝俊英);  Jiang JL(姜金龙)
Adobe PDF(2112Kb)  |  Favorite  |  View/Download：230/2  |  Submit date：2014/12/17