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Optimization of sputter-deposited corrosion resistant a-C(:H) films with excellent tribological performance by control of methane flow rate 期刊论文
Thin Solid Films, 2022, 期号: 763, 页码: Thin Solid Films
Authors:  Cong Wang;  Cunxiu Zhang;  Dewen Niu;  Jian Kang;  Yan Lu;  Junying Hao
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