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Structural, mechanical and tribological characterizations of a-C:H:Si films prepared by a hybrid PECVD and sputtering technique, 期刊论文
Journal of Physics D: Applied Physics, 2009, 卷号: 42, 页码: 165407(1-13)
Authors:  Zhao F(赵飞);  Li HX(李红轩);  Ji L(吉利);  Mo YF(莫宇飞);  Quan WL(权伟龙);  Zhou HD(周惠娣);  Chen JM(陈建敏)
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