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Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering 期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
Authors:  Kong QH(孔庆花);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Wang YJ(王永军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(921Kb)  |  Favorite  |  View/Download：219/2  |  Submit date：2012/09/24
Crnx FIlms  Medium Frequency Magnetron Sputtering  N2 Content  Microstructure  Mechanical Properties  Tribological Properties