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Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD 期刊论文
Transactions of Nonferrous Metals Society of China, 2004, 卷号: 14, 页码: 222-228
Authors:  Li HX(李红轩);  Xu T(徐洮);  Hao JY(郝俊英);  Chen JM(陈建敏);  Zhou HD(周蕙娣);  Xue QJ(薛群基);  Liu HW(刘惠文)
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