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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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真空与低温 [1]
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张斌 [1]
赖振国 [1]
闫巨擘 [1]
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中文 [1]
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2023 [1]
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Community：中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
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Date Issued：2023
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氮含量对(BCSiAlCr)N_(x)薄膜结构和耐腐蚀性能的影响
期刊论文
真空与低温, 2023, 卷号: 29, 期号: 01, 页码: 28-35
Authors:
闫巨擘
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赖振国
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张斌
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Submit date：2023/12/07
磁控溅射
耐腐蚀性能
硬度
（BCSiAlCr）Nx薄膜
力学性能
