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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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真空 [1]
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刘建喜 [1]
刘相 [1]
陈学康 [1]
陈炯枢 [1]
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中文 [1]
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2007 [1]
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Creator：刘建喜
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Date Issued：2007
Creator：陈炯枢
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低能电子束制备硅基纳米薄膜微结构研究
期刊论文
真空, 2007, 卷号: 44, 期号: 6, 页码: 35-38
Authors:
陈炯枢
;
陈学康
;
刘相
;
刘建喜
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Submit date：2013/11/01
电子束直写曝光
选择性化学沉积
图案化
Electron Beam Direct- Write Exposure
Selective Chemical Deposition
Patternization
