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Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD 期刊论文
Diamond & Related Materials, 2021, 期号: 114, 页码: 108308
Authors:  Xubing Wei;  Pingmei Yin;  Jian Wu;  Xiangfan Nie;  Zhibin Lu;  Guangan Zhang
Adobe PDF(6347Kb)  |  Favorite  |  View/Download：48/0  |  Submit date：2021/12/03
Hollow cathode PECVD  DLC films  Pipes inner wall  U-type pipes  Corrosion  Tribology