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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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物理学报 [1]
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磨损和表面工程组 [1]
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Source Publication：物理学报
Date Issued：2012
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非平衡磁控溅射制备类石墨碳膜及性能研究
期刊论文
物理学报, 2012, 卷号: 61, 期号: 5, 页码: 056103(1-7)
Authors:
王永军
;
李红轩
;
吉利
;
刘晓红
;
吴艳霞
;
周惠娣
;
陈建敏
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Submit date：2013/07/12
磁控溅射
类石墨碳膜
微观结构
性能
Magnetron Sputtering
Graphite-like Carbon Film
Microstructure
Performance
