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Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Zhang JY(张俊彦);  Liu WM(刘维民);  Liu WM(刘维民)
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