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| Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Physics D: Applied Physics, 2006, 卷号: 39, 页码: 1149–1155
Authors: Hao JY(郝俊英) ; Xu T(徐洮); Zhang JY(张俊彦); Liu WM(刘维民); Liu WM(刘维民)
 Adobe PDF(522Kb) |  Favorite | View/Download：170/1 | Submit date：2014/12/23 |
| Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors: Hao JY(郝俊英); Xu T(徐洮); Liu WM(刘维民); Liu WM(刘维民)
Adobe PDF(295Kb) | Favorite | View/Download：201/1 | Submit date：2014/12/23
Carbon Nitride Films Pecvd Composition Mechanical Properties |
| Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676
Authors: Hao JY(郝俊英); Xu T(徐洮); Liu WM(刘维民); Liu WM(刘维民)
Adobe PDF(173Kb) | Favorite | View/Download：218/1 | Submit date：2014/12/23 |
| Effect of applied dc bias voltage on the composition, chemical bonding and mechanical properties of carbon nitride films prepared by PECVD 期刊论文
Transactions of Nonferrous Metals Society of China, 2004, 卷号: 14, 页码: 222-228
Authors: Li HX(李红轩); Xu T(徐洮); Hao JY(郝俊英); Chen JM(陈建敏); Zhou HD(周蕙娣); Xue QJ(薛群基); Liu HW(刘惠文)
image/png(111Kb) | Favorite | View/Download：281/2 | Submit date：2014/12/23 |
