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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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非现建制 [1]
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摩擦学学报 [1]
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国家自然科学基金资助... [1]
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刘家浚 [1]
庄大明 [1]
张平余 [1]
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1995 [1]
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Funding Organization：国家自然科学基金资助项目
Creator：zhangpingyu分张平余
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工艺因素对离子束增强沉积氮化硅薄膜组成与结构的影响
期刊论文
摩擦学学报, 1995, 卷号: 15, 期号: 2, 页码: 97-103
Authors:
庄大明
;
刘家浚
;
李文治
;
朱宝亮
;
张绪寿
;
张平余
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Submit date：2015/07/09
离子束增强沉积
陶瓷
薄膜
化学组成
晶体结构
单晶硅
52100钢
Ion Beam Enhanced depositIon
Ceramics
Thin Film
Chemical Composition
Crystal Structure
Single Crystal Silicon
52100 Steel
