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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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空间润滑材料组 [1]
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郑建云 [1]
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2012 [1]
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Funding Project：空间润滑材料组
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磁控溅射法制备氮化物硬质膜及其性能研究
学位论文
: 中国科学院研究生院, 2012
Authors:
郑建云
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Submit date：2013/04/01
氮化物硬质膜
磁控溅射
多层复合
微观结构
摩擦与磨损
Hard Nitride-based Films
Magnetron Sputtering
Multilayercomposite
Microstructure
Friction And Wear
