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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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中国表面工程 [1]
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张斌 [1]
高海洋 [1]
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中文 [1]
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2022 [1]
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脉冲频率对HiPIMS制备TiN薄膜组织和力学性能的影响
期刊论文
中国表面工程, 2022, 卷号: 35, 期号: 5, 页码: 192-199
Authors:
高海洋
;
张斌
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Submit date：2023/12/08
高功率脉冲磁控溅射(HiPIMS)
脉冲频率
TiN薄膜
微观组织
力学性能
