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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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复合润滑材料组;金属... [1]
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苏博 [1]
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2016 [1]
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Community：中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心
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Date Issued：2016
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陶瓷微型零件的软刻蚀成形与缺陷控制
学位论文
, 北京: 中国科学院大学, 2016
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苏博
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Submit date：2016/11/25
陶瓷
微制造
软刻蚀
缺陷控制
Ceramics
Microfabrication
Soft Lithography
Defect Control
