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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Surface an... [1]
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纳米润滑研究组 [1]
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周妍 [1]
张俊彦 [1]
张斌 [1]
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2012 [1]
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Funding Project：纳米润滑研究组
Source Publication：Surface and Interface Analysis
Date Issued：2012
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The effect of thermal annealing on the microstructure and mechanical properties of magnetron sputtered hydrogenated amorphous carbon films
期刊论文
Surface and Interface Analysis, 2012, 卷号: 44, 期号: 2, 页码: 162-165
Authors:
Zhang B(张斌)
;
Zhou Y(周妍)
;
Zhang JY(张俊彦)
;
Wang Z(王舟)
;
Zhang JY(张俊彦)
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Submit date：2013/07/12
Mechanical
Carbon Films
Magnetron Sputtering
