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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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磨损和表面工程组 [1]
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孔庆花 [1]
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2011 [1]
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Funding Project：磨损和表面工程组
Creator：孔庆花
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氮化铬硬质膜的制备及其性能研究
学位论文
: 中国科学院研究生院, 2011
Authors:
孔庆花
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Submit date：2012/11/09
Crnx薄膜
中频脉冲磁控溅射
工艺参数
微观结构
摩擦学性能
Crnx Films
Medium Frequency Pulse Magnetron Sputtering
Deposition Parameters
Microstructure
Tribological Properties
