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Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation 期刊论文
Surface and Interface Analysis, 2012, 卷号: 44, 期号: 7, 页码: 837-843
Authors:  Huang DM(黄德明);  Pu JB(蒲吉斌);  Lu ZB(鲁志斌);  Xue QJ(薛群基);  Lu ZB(鲁志斌)
Adobe PDF(2969Kb)  |  Favorite  |  View/Download:250/4  |  Submit date:2013/07/12
Graphite-like Carbon  Molecular Dynamics  Silicon Substrate  Internal Stress  Surface Roughness