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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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中国科学院材料磨损与... [1]
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表面技术 [1]
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张斌 [1]
贾倩 [1]
赖振国 [1]
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2022 [1]
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Date Issued：2022
Source Publication：表面技术
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非晶含氢碳薄膜本征结构对退火行为的影响
期刊论文
表面技术, 2022, 卷号: 51, 期号: 7, 页码: 98-106
Authors:
贾倩
;
张斌
;
赖振国
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Submit date：2023/12/08
非晶含氢碳薄膜
退火
双极脉冲
直流脉冲
等离子体增强化学气相沉积
