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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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王雄伟 [1]
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2018 [1]
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Date Issued：2018
Creator：王雄伟
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反应磁控溅射制备AlN薄膜及其耐腐蚀性能研究
学位论文
工学硕士, 北京: 中国科学院大学, 2018
Authors:
王雄伟
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Submit date：2019/10/31
反应磁控溅射
AlN薄膜
腐蚀
极化曲线
电化学阻抗谱
Reactive magnetron sputtering
AlN film
Corrosion
Polarization curve
Electrochemical impedance spectroscopy
