Chinese | English

Search in the results

LICP OpenIR

Browse/Search Results:  1-3 of 3 Help

Filters        
Selected(0)Clear Items/Page:    Sort:
The effects of negative bias and flux ratio on the properties of TiN thin films formed by filtered cathodic arc plasma technique 期刊论文
Acta metallurgica sinica, 2005, 卷号: 18, 期号: 3, 页码: 369-374
Authors:  Zhang YJ(张玉娟);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Zhang WW(张伟伟);  Wang J(王君);  Xue QJ(薛群基)
Adobe PDF(737Kb)  |  Favorite  |  View/Download：197/0  |  Submit date：2014/03/03
Tin  Filtered Cathodic Arc Plasma  Preferred Orientation  
Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(295Kb)  |  Favorite  |  View/Download：201/1  |  Submit date：2014/12/23
Carbon Nitride Films  Pecvd  Composition  Mechanical Properties  
Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
Adobe PDF(173Kb)  |  Favorite  |  View/Download：218/1  |  Submit date：2014/12/23