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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Advanced M... [1]
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低维材料摩擦学组 [1]
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the Natura... [1]
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姜金龙 [1]
朱伟君 [1]
陈娣 [1]
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2012 [1]
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Indexed By：EI
Funding Project：低维材料摩擦学组
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Synthesis and characterization of quaternary Ti-Si-C-N film deposited by middle frequency magnetron sputtering
期刊论文
Advanced Materials Research, 2012, 卷号: 581-582, 页码: 540-543
Authors:
Jiang JL(姜金龙)
;
Chen D(陈娣)
;
Zhu WJ(朱伟君)
;
Jiang JL(姜金龙)
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Submit date：2013/07/12
Ti-si-c-n Films
Microstructure
Mf Magnetron Sputtering
