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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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真空与低温 [1]
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尚伦霖 [1]
张广安 [1]
魏徐兵 [1]
鲁志斌 [1]
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中文 [1]
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2020 [1]
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利用PECVD 快速沉积超厚类金刚石碳基薄膜技术
期刊论文
真空与低温, 2020, 卷号: 26, 期号: 5, 页码: 402-409
Authors:
魏徐兵
;
尚伦霖
;
鲁志斌
;
张广安
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Submit date：2020/11/30
等离子体增强化学气相沉积
超厚类金刚石碳膜
快速沉积
耐磨损
耐腐蚀
