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Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation 期刊论文
Surface and Interface Analysis, 2012, 卷号: 44, 期号: 7, 页码: 837-843
Authors:  Huang DM(黄德明);  Pu JB(蒲吉斌);  Lu ZB(鲁志斌);  Xue QJ(薛群基);  Lu ZB(鲁志斌)
Adobe PDF(2969Kb)  |  Favorite  |  View/Download：251/4  |  Submit date：2013/07/12
Graphite-like Carbon  Molecular Dynamics  Silicon Substrate  Internal Stress  Surface Roughness  
类金刚石薄膜沉积、微结构及力学性能分子动力学模拟研究 学位论文
: 中国科学院研究生院, 2011
Authors:  黄德明
Adobe PDF(6175Kb)  |  Favorite  |  View/Download：428/1  |  Submit date：2012/11/07
类金刚石薄膜  分子动力学  纳米压痕  内应力  织构化  Diamond-like Carbon Films  Molecular Dynamics  Nano-indentation  Internal Stress  Texture