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The combined effect of surface roughness and internal stresses on nanoindentation tests of polysilicon thin films 期刊论文
Journal of Applied Physics, 2012, 卷号: 112, 期号: 4, 页码: 044512(1-8)
Authors:  Wang Q(王权);  Hu R(胡然);  Shao Y(邵银);  Wang Q(王权)
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