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The correlation between nano-hardness and elasticity and fullerene-like clusters in hydrogenated amorphous carbon films 期刊论文
Chemical Physics Letters, 2018, 卷号: 692, 期号: 0, 页码: 258-263
Authors:  Wang YF(王永富);  Gao KX(高凯雄);  Wang, Qi;  Zhang JY(张俊彦);  Zhang JY(张俊彦)
Adobe PDF(2031Kb)  |  Favorite  |  View/Download：186/5  |  Submit date：2018/06/11
Fullerene-like  Hardness  Amorphous Carbon  Chemical Vapor Deposition  h Bonded Sites  
Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition 期刊论文
Applied Surface Science, 2008, 卷号: 255, 页码: 1836-1840
Authors:  Wang Q(王琦);  Wang CB(王成兵);  Wang Z(王舟);  Zhang JY(张俊彦);  He DY(贺德衍)
Adobe PDF(1128Kb)  |  Favorite  |  View/Download：121/2  |  Submit date：2013/03/28
Amorphous Carbon  Stress  Buckling  Dc-pulse Plasma Chemical Vapor Deposition