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Annealing effect on the microstructure modification and tribological properties of amorphous carbon nitride films 期刊论文
Journal of Applied Physics, 2008, 卷号: 104, 页码: 73306(1-7)
Authors:  Wang Z(王舟);  Wang CB(王成兵);  Wang Q(王琦);  Zhang JY(张俊彦)
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