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A simple approach to fabricate amorphous silicon pattern on single crystal silicon 期刊论文
Tribology International, 2007, 卷号: 40, 页码: 360-364
Authors:  Li XC(李小成);  Lv JJ(吕晋军);  Wan ZH(万志华);  Meng JH(孟军虎);  Yang SR(杨生荣)
Adobe PDF(266Kb)  |  Favorite  |  View/Download：164/0  |  Submit date：2013/11/01
Amorphous  Single Crystal Silicon  Scratch  
Elastic properties of a-C:N:H films 期刊论文
Journal of Applied Physics, 2007, 卷号: 101, 页码: 013501(1-6)
Authors:  Wang CB(王成兵);  Yang SR(杨生荣);  Li HX(李红轩);  Zhang JY(张俊彦)
Adobe PDF(155Kb)  |  Favorite  |  View/Download：273/3  |  Submit date：2013/11/01