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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Creator：孙嘉奕
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Date Issued：2013
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沉积温度和氩气压力对钛薄膜物相结构和性能的影响
期刊论文
机械工程材料, 2013, 卷号: 37, 期号: 10, 页码: 44-49
Authors:
高晓明
;
孙嘉奕
;
胡明
;
翁立军
;
伏彦龙
;
杨军
;
谭洪根
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Submit date：2013/12/27
低温沉积
钛薄膜
物相结构
性能
Low Temperature Deposition
Ti Film
Phase Structure
Property
