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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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纳米润滑研究组 [1]
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张俊彦 [1]
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2016 [1]
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Creator：gaokaixiong分高凯雄
Date Issued：2016
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一种类金刚石薄膜的磁靴增强磁控溅射镀膜装置
专利
专利类型: 实用新型, 专利号: 201520837488.3, 申请日期: 2016-04-13, 公开日期: 2016-04-13
Inventors:
张斌
;
张俊彦
;
高凯雄
;
强力
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Submit date：2017/05/05
