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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
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Source Publication：Applied Surface Science
Date Issued：2008
Funding Project：纳米润滑研究组
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Stress relief patterns of hydrogenated amorphous carbon films grown by dc-pulse plasma chemical vapor deposition
期刊论文
Applied Surface Science, 2008, 卷号: 255, 页码: 1836-1840
Authors:
Wang Q(王琦)
;
Wang CB(王成兵)
;
Wang Z(王舟)
;
Zhang JY(张俊彦)
;
He DY(贺德衍)
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Submit date：2013/03/28
Amorphous Carbon
Stress
Buckling
Dc-pulse Plasma Chemical Vapor Deposition
